Integrated design and manufacture of thin film multilayer filters using an automated deposition system

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TypeArticle
Journal titlePhysics in Canada
Volume52
Pages213215; # of pages: 3
Publication date
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedYes
NPARC number12327911
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Record identifierde9df6bb-d49e-4003-ab0e-0e4bf41dd88b
Record created2009-09-10
Record modified2016-05-09
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