Characterization of (100)InP after surface passivation as studied by AFM, XPS and SIMS

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TypeArticle
Proceedings titleECS/ESSDERC Symposium on Analytical Techniques for Semiconductor Materials and Process Characterization II; Electrochemical Society
ConferenceECS/ESSDERC Symposium on Analytical Techniques for Semiconductor Materials and Process Characterization II, 1995
Volume95
Issue30
Pages253–; # of pages: 1
Publication date
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12338196
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Record identifierdeaec3ed-0594-40eb-93cb-b342046687c1
Record created2009-09-10
Record modified2016-05-09
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