Residual stress control in TiN/Si coatings deposited by unbalanced magnetron sputtering

AuthorSearch for:
TypeArticle
Journal titleSurface & Coatings Technology
SubjectKeywords: [C] Magnetron; [C] Reactive sputtering; [D] Titanium nitride; [X] Residual stress; [X] Thermal relaxation
AffiliationNRC Institute for Aerospace Research; National Research Council Canada
Access conditionavailable
unclassified
unlimited
Peer reviewedNo
NRC numberSMPL-2004-0180
NPARC number9073759
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Record identifierdfcf70bf-db15-44c0-aee5-8cce0f90694d
Record created2009-06-02
Record modified2016-05-09
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