Optical manipulation of microparticles in an SU-8/PDMS hybrid microfluidic chip incorporating a monolithically integrated on-chip lens set

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DOIResolve DOI: http://doi.org/10.1109/JSTQE.2009.2033212
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TypeArticle
Journal titleIEEE journal of selected topics in quantum electronics
Volume16
Issue4
Pages919926; # of pages: 8
SubjectIntegrated devices; Microfluidic device; Optical manipulation
AbstractAn SU-8/PDMS microfluidic chip incorporating a monolithically integrated on-chip lens set for transport and manipulation of microparticles is developed. The components, including the on-chip lens set, the microfluidic channel, and the fiber grooves, are defined in a single layer of SU-8 by one-step photolithography. The design of the on-chip lens set and the fabrication of the microfluidic chip are fully described. The influence of the beam-waist radius on the manipulation performance is theoretically analyzed and experimentally verified for the first time. In the cross-type optofluidic architecture, the evaluation is performed by measuring the particle displacement with different beam-waist radii under different fluid-flow rates. The on-chip lens set is designed to have a specific dimension to achieve the required beam-waist radius. It is revealed that the particle displacement is counter-proportional to the beam-waist radius. An experiment is performed. The results show that the particle displacement is increased by reducing the beam-waist radius. The optical manipulation of microparticles is also demonstrated by using two counter-propagating light beams that are perpendicular to the fluid-flow direction with the beamwaist radius determined by two on-chip lens sets placed on the two sides of the microfluidic channel. The proposed architecture could be used to enhance the performance in particle transport, separation, and concentration.
Publication date
LanguageEnglish
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedYes
NPARC number17281064
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Record identifierdfef7976-d202-4b48-b6a9-e24f5ebc4443
Record created2011-03-26
Record modified2016-05-09
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