Fabrication and structural and optical properties of amorphous Si/SiO2 superlattices on (100)Si

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TypeArticle
Proceedings titleStructure and properties of multilayered thin films : symposium held April 17-19, 1995, San Francisco, California, U.S.A.
Series titleMaterials Research Society symposia proceedings; Volume 382
ConferenceMaterials Research Society Meeting, Symposium G, Structure and properties of multilayered thin films, San Francisco, California, USA, April 17-19, 1995
ISBN1558992855
Pages259264; # of pages: 6
Publication date
PublisherMaterials Research Society
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12338943
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Record identifiere0c8e523-a057-4acd-a5e5-8085478d3790
Record created2009-09-11
Record modified2016-05-09
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