Inorganic polymer resists for EUVL

TypeArticle
Publication date
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number85
NPARC number8926388
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Record identifiere149347d-af89-4854-b6ff-53b6ffe31014
Record created2009-04-23
Record modified2016-05-09
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