Si1-x-yGexCy Alloy Growth by Electron Cyclotron Resonance Plasma-Assisted Si Molecular Beam Epitaxy

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DOIResolve DOI: http://doi.org/10.1016/S0921-5107(01)00802-9
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TypeArticle
Journal titleMaterials Science & Engineering B
Volume89
Issue1-3
Pages296302; # of pages: 7
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744560
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Record identifiere3d988bc-007f-442a-9677-a1ef2019c1be
Record created2009-10-27
Record modified2016-05-09
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