Pulsed laser deposition of pseudocapacitive metal oxide thin films for supercapacitor applications

  1. Get@NRC: Pulsed laser deposition of pseudocapacitive metal oxide thin films for supercapacitor applications (Opens in a new window)
DOIResolve DOI: http://doi.org/10.4028/www.scientific.net/MSF.706-709.884
AuthorSearch for:
Proceedings titleMaterials Science Forum
Conference7th International Conference on Processing and Manufacturing of Advanced Materials, THERMEC'2011, 1 August 2011 through 5 August 2011, Quebec City, QC
Pages884889; # of pages: 6
SubjectAmorphous phase; Aqueous electrolyte; Cyclic durability; Different substrates; Electrochemical capacitor; Material research; Metal oxide thin films; Oxygen gas pressure; Oxygen pressure; PLD process; Polycrystalline; Pseudocapacitive; Scan rates; Specific capacitance; Stainless steel substrates; Super capacitor; Supercapacitor application; Ultracapacitors; Amorphous films; Amorphous materials; Capacitance; Capacitors; Cyclic voltammetry; Deposition; Manganese; Manganese oxide; Metallic compounds; Oxide films; Oxides; Oxygen; Programmable logic controllers; Pulsed laser deposition; Sodium; Stainless steel; Substrates; Thin films; Vapor deposition; X ray diffraction; Pulsed lasers; Manganese
AbstractThin films of manganese oxides have been prepared by pulsed laser deposition (PLD) process on silicon and stainless steel substrates at different substrate temperatures and oxygen gas pressures. By proper selection of temperature and oxygen pressure during the PLD process, pure phases of Mn 2O 3, Mn 3O 4 as well as an amorphous phase of MnO x were successfully fabricated and characterized by X-ray diffraction. The pseudo-capacitance behaviors of those manganese oxides of different phases have also been evaluated by the electrochemical cyclic voltammetry in 0.1 M Na 2SO 4 aqueous electrolyte. Their specific current and capacitance determined at different scan rates were calculated and compared. The results show that polycrystalline Mn 2O 3 phase has the highest specific current and capacitance, while the values for polycrystalline Mn 3O 4 films are the lowest. The amorphous phase MnOx films have the values sitting in between those of Mn 2O 3 and Mn 3O 4. The specific capacitance of Mn 2O 3 films reaches 200 F/g at 1 mV/sec scan with excellent stability and cyclic durability. This work has demonstrated that PLD is a very promising technique for supercapacitor material research due to its excellent flexibility and capability of controlling microstructures and phases of various materials. © 2012 Trans Tech Publications, Switzerland.
Publication date
AffiliationNational Research Council Canada (NRC-CNRC); NRC Industrial Materials Institute (IMI-IMI)
Peer reviewedYes
NPARC number21269325
Export citationExport as RIS
Report a correctionReport a correction
Record identifiere406e215-db66-45d1-ad6c-e4d07ed49b07
Record created2013-12-12
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)