X-ray photoelectron spectroscopic study of KrF excimer laser nitrided InP surface

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DOIResolve DOI: http://doi.org/10.1063/1.1412837
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TypeArticle
Journal titleJournal of Applied Physics
Volume90
Issue12
Pages58515855; # of pages: 5
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Institute for Chemical Process and Environmental Technology
Peer reviewedYes
NPARC number12744166
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Record identifiere5575492-2c6f-4587-966f-cc8d8dabb393
Record created2009-10-27
Record modified2017-03-23
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