A 100-channel near-infrared SOI waveguide microspectrometer: Design and fabrication challenges

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TypeArticle
ConferenceSPIE Photonics Asia, 2004
Volume5644
Pagespaper 564417
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346704
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Record identifiere9b219e1-b487-40ed-9a22-3fd87b240e74
Record created2009-09-17
Record modified2016-05-09
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