Synthesis of tantalum pentoxide films by pulsed laser deposition: material characterization and scale-up

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DOIResolve DOI: http://doi.org/10.1016/S0040-6090(99)00703-8
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TypeArticle
Journal titleThin Solid Films
Volume358
Issue1-2
Pages104113; # of pages: 10
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Institute for National Measurement Standards
Peer reviewedNo
NPARC number12744342
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Record identifiereb54c30b-ec07-4554-8de8-b79a0201a174
Record created2009-10-27
Record modified2016-05-09
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