Non-lithographic fabrication of metallic micromold masters by laser machining and welding

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DOIResolve DOI: http://doi.org/10.1007/s00170-011-3477-1
AuthorSearch for: ; Search for: ; Search for: ; Search for:
TypeArticle
Journal titleThe International Journal of Advanced Manufacturing Technology
ISSN0268-3768
1433-3015
Volume59
Issue1
Pages157167; # of pages: 11
Subjectlab-on-a-chip; microfluidics; mold masters; microfabrication; laser machining; microwelding; soft molding; hot embossing
AbstractA non-lithographic process of rapidly fabricating metallic micromold masters for the manufacture of disposable polymer microfluidic devices is presented in this paper. The developed technique exploits the precision material removal capabilities of industrial lasers to cut accurate profiles of microfeatures (e.g., liquid flow microchannels, reservoirs, passive micromixers) from thin metallic sheets. The machined micropatterns are then laser welded onto a metal substrate to form the final functional mold master. Multiple versions of the functional device are replicated from the assembled master by either soft molding polydimethylsiloxane or hot embossing polymethyl methacrylate. Several metallic micromold masters and polymer replicas are tested for dimensional accuracy and surface roughness to verify the developed microfabrication process.
Publication date
PublisherSpringer
LanguageEnglish
AffiliationNRC Industrial Materials Institute; National Research Council Canada
Peer reviewedYes
Identifier3477
NPARC number21268258
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Record identifieredeffc4a-7fca-42c1-bab3-f55a528bd6dd
Record created2013-06-10
Record modified2016-05-09
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