Femtosecond laser fabrication of nanostructures in silica glass

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DOIResolve DOI: http://doi.org/10.1364/OL.28.001043
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TypeArticle
Journal titleOptics Letters
Volume28
Issue12
Pages10431045; # of pages: 3
AbstractA femtosecond laser beam focused inside fused silica and other glasses can modify the refractive index of the glass. Chemical etching and atomic-force microscope studies show that the modified region can have a sharp-tipped cone-shaped structure with a tip diameter as small as 100 nm. Placing the structure near the bottom surface of a silica glass sample and applying a selective chemical etch to the bottom surface produces clean, circular, submicrometer-diameter holes. Holes spaced as close to one another as 1.4 µm are demonstrated.
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Steacie Institute for Molecular Sciences
Peer reviewedYes
NPARC number12330223
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Record identifieree24fe47-7ef3-4437-a937-f4b1be3772d4
Record created2009-09-10
Record modified2016-05-09
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