Comparative analysis of microactuators fabricated by femtosecond and nanosecond laser micromachining

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DOIResolve DOI: http://doi.org/10.1088/1742-6596/59/1/148
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TypeArticle
Journal titleJournal of Physics: Conference Series
ISSN1742-6596
Volume59
Pages700703; # of pages: 4
AbstractLaser micromachining technology is a cost-effective microfabrication technique for prototyping and in some cases batch production of miniature components and microdevices with complex geometries requiring high accuracy and precision. The objective of this paper is to analyze experimentally the effect of the laser micromachining process and its parameters, particularly, the pulse duration, on the characteristics of the fabricated functional microdevices. This was achieved through the microfabrication of two electro-thermally driven in-plane microactuators using a femtosecond and a nanosecond pulse laser. The dynamic/static performance of the microactuators was compared with respect to the required current/power and generated actuation force/displacement and the geometric quality of the machining.
Publication date
LanguageEnglish
AffiliationNRC Industrial Materials Institute; National Research Council Canada
Peer reviewedYes
NPARC number21273507
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Record identifiereef73b41-41e9-4648-938b-038d384a276d
Record created2015-01-13
Record modified2016-05-09
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