Large Area 50 nm Period Grating by Multiple Nanoimprint Lithography and Spatial Frequency Doubling

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DOIResolve DOI: http://doi.org/10.1063/1.2390652
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TypeArticle
Journal titleApplied Physics Letters
Volume90
Issue4
Publication date
LanguageEnglish
AffiliationNational Research Council Canada
Peer reviewedYes
NRC number53659
NPARC number12744732
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Record identifierf1101659-6367-4ee6-ae6f-4100fbc55b7e
Record created2009-10-27
Record modified2016-05-09
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