Photo-enhanced chemical wet etching of GaN

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DOIResolve DOI: http://doi.org/10.1016/S0921-5107(02)00323-9
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TypeArticle
Journal titleMaterials science and engineering B
Volume96
Issue1
Pages4347; # of pages: 5
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Steacie Institute for Molecular Sciences
Peer reviewedNo
NPARC number12328468
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Record identifierf2065d26-7f77-4c21-90d8-124b0c4da676
Record created2009-09-10
Record modified2016-05-09
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