Observations of the microscopic growth mechanism of pillars and helices formed by glancing-angle thin-film deposition

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DOIResolve DOI: http://doi.org/10.1116/1.1326940
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TypeArticle
Journal titleJournal of Vacuum Science & Technology A : Vacuum, Surfaces, and Films
Volume19
Issue1
Pages158166; # of pages: 9
Subjectrandom processes; scanning electron microscopy; transmission electron microscopy; vapour deposition
AbstractWe have studied the mechanisms influencing growth of thin films onto an oblique rotating substrate by cross-sectional transmission electron microscopy and scanning electron microscopy. We have analyzed the growth of pillars and helices in random and regular arrays, and have examined the influence of introducing a line of missing nuclei on the growth of regular array of pillars and helices.
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LanguageEnglish
Peer reviewedNo
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This is a non-NRC publication

"Non-NRC publications" are publications authored by NRC employees prior to their employment by NRC.

NPARC number12338246
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Record identifierf2274dbd-a120-4dc0-879f-82d0b1ede1f8
Record created2009-09-10
Record modified2016-05-09
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