Real-time ultrafast optical interferometry of NEMS operating in fluidic environment

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DOIResolve DOI: http://doi.org/10.1117/12.875752
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TypeArticle
Proceedings titleSPIE - International Society for Optical Engineering. Proceedings
ConferenceMicrofluidics, BioMEMS, and Medical Microsystems IX, 23 January 2011 through 25 January 2011, San Francisco, CA
ISSN0277-786X
ISBN9780819484666
Volume7929
Article number79290V
SubjectComprehensive studies; Fluid Damping; High Pressure; Liquid CO; Multiple devices; Non-newtonian; Optical interferometry; Relaxation time models; Resonant dynamics; Small scale; Ultra-fast; Viscous limits; Viscousity; Biosensors; Carbon dioxide; Damping; Interferometry; Microfluidics; Microsystems; Fluids
AbstractInteractions of NEMS with fluids are of interest both in determining the NEMS performance outside of vacuum, and in elucidation of fluid dynamics at these small scales. We present a comprehensive study of nanomechanical damping in three gases (He, N 2, CO 2), and liquid CO 2. Resonant dynamics in multiple devices of varying size and frequency (10-400 MHz) is measured over 10 decades of pressure (1 mPa-20 MPa). We find a fluid relaxation time model to be valid throughout, but not beyond, the non-Newtonian regime (up to several atmospheres), and classical vibrating spheres model to be valid in the viscous limit. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); National Institute for Nanotechnology (NINT-INNT)
Peer reviewedYes
NPARC number21271184
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Record identifierf49e3448-99c3-49ec-80b6-9ca17aa17342
Record created2014-03-24
Record modified2017-04-24
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