Large Q-factor Improvement for spiral inductors on silicon using proton implantation

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DOIResolve DOI: http://doi.org/10.1109/LMWC.2003.819383
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TypeArticle
Journal titleIEEE Microwave and Wireless Components Letters
Volume13
Issue11
Pages460462; # of pages: 3
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744407
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Record identifierf509704e-11ac-408f-aa54-b6375a6f2372
Record created2009-10-27
Record modified2016-05-09
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