Surface topography and composition of InP(100) after various sulfur passivation treatments

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DOIResolve DOI: http://doi.org/10.1116/1.588132
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TypeArticle
Journal titleJournal of Vacuum Science and Technology B
Volume13
Issue5
Pages20532056; # of pages: 4
SubjectCHEMICAL COMPOSITION; COMPARATIVE EVALUATIONS; INDIUM ANTIMONIDES; PASSIVATION; ROUGHNESS; SULFUR COMPOUNDS; SURFACE STRUCTURE
AbstractInP(100) surfaces were S passivated in S2Cl2, (NH4)2S and sulfide-containing Br2 solutions. After S2Cl2 treatments, observations using atomic force microscopy indicated that the sample surface was rougher than the as-received sample. Some residual oxide was also identified by Auger electron spectroscopy and x-ray photoelectron spectroscopy analysis. Treatment of InP(100) in (NH4)2S and Br2/MeOH solutions containing trace amounts of S2Cl2 and (NH4)2S significantly reduced the surface roughness of the as-received sample. These treated surfaces were also found to be free of oxide and S passivated. These solutions therefore effectively removed the native oxide leaving substrates approaching atomic flatness and subsequently passivated surfaces with sulfur from the solution.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12338165
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Record identifierf510cfd8-d4fd-4edf-884f-3197128533d6
Record created2009-09-10
Record modified2016-05-09
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