A knife-edge measurement of the beam profile of STXM 5.3.2.2 using a focussed ion beam milled metallic glass

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DOIResolve DOI: http://doi.org/10.1016/j.elspec.2012.07.003
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TypeArticle
Journal titleJournal of Electron Spectroscopy and Related Phenomena
ISSN0368-2048
Volume185
Issue11
Pages453457; # of pages: 5
SubjectScanning transmission X-ray microscopy (STXM) resolution; Focussed ion beam (FIB) milling; Metallic glass
AbstractWe present a simple knife-edge measurement of the STXM 5.3.2.2 synchrotron X-ray beam width. The knife edge was constructed by ion beam milling a metallic glass alloy consisting of 60% gold, 20% nickel and 20% hafnium and was determined to be well-defined to within 2 nm by TEM. An asymmetric beam profile of 120 nm FWHM in the vertical direction and 150 nm FWHM in the horizontal direction was determined and was observed to depart from the expected Airy function profile.
Publication date
LanguageEnglish
AffiliationSecurity and Disruptive Technologies; National Research Council Canada
Peer reviewedYes
IdentifierS0368204812000758
NPARC number21268740
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Record identifierf59d1f31-fadc-4bed-8681-af01de2c901e
Record created2013-11-12
Record modified2016-05-09
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