Hot Embossing Lithography: Release-Layer Characterization by Chemical Force Microscopy

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TypePresentation
ConferenceMRS Spring Meeting, San Francisco, California, March 28-April 01, 2005
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); NRC Industrial Materials Institute
Peer reviewedYes
NRC number47933
NPARC number15966876
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Record identifierf69d2f7a-5d6c-4730-902f-4a1b8ccfe139
Record created2010-10-05
Record modified2016-05-09
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