SOI waveguide fabrication process development using star coupler scattering loss measurements

Alternative titleSPIE
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TypeArticle
ConferenceDec 2007, Australia
Volume6800
Article number680014
Pages112; # of pages: 12
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346638
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Record identifierf961b26c-af20-447d-8702-ff4f376c27df
Record created2009-09-17
Record modified2016-05-09
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