Carbon contamination in scanning transmission electron microscopy and its impact on phase-plate applications

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DOIResolve DOI: http://doi.org/10.1016/j.micron.2017.02.002
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TypeArticle
Journal titleMicron
ISSN0968-4328
Volume96
Pages3847
Subjectscanning transmission electron microscopy; contamination; electron-beam induced charging; phase plate; graphitized carbon; thin film
AbstractWe analyze electron-beam induced carbon contamination in a transmission electron microscope. The study is performed on thin films potentially suitable as phase plates for phase-contrast transmission electron microscopy. Electron energy-loss spectroscopy and phase-plate imaging is utilized to analyze the contamination. The deposited contamination layer is identified as a graphitic carbon layer which is not prone to electrostatic charging whereas a non-conductive underlying substrate charges. Several methods that inhibit contamination are evaluated and the impact of carbon contamination on phase-plate imaging is discussed. The findings are in general interesting for scanning transmission electron microscopy applications.
Publication date
PublisherElsevier
LanguageEnglish
AffiliationNational Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NPARC number23002391
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Record identifierfabed280-81e3-4aa5-a0c5-04ea72b8d784
Record created2017-10-26
Record modified2017-10-26
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