High-temperature gas sensor using perovskite thin films on a suspended microheater

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DOIResolve DOI: http://doi.org/10.1116/1.1463072
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TypeArticle
Journal titleJournal of vacuum science & technology. A. Vacuum, surfaces, and films
ISSN07342101
Volume20
IssueMay 3
Pages11001104; # of pages: 5
Subjectgas sensors; high-temperature techniques; CMOS integrated circuits; electric resistance; arrays; strontium compounds; pulsed laser deposition
Publication date
PublisherAmerican Vacuum Society
Copyright noticeYou may reproduce (print, make photocopies, or download) materials from NPArC without permission for non-commercial purposes (research, education, and private study) only, on the condition that you provide proper attribution of the sources in all copies.
LanguageEnglish
AffiliationNRC Institute for Chemical Process and Environmental Technology (ICPET-ITPCE); NRC Industrial Materials Institute (IMI-IMI); National Research Council Canada
Access conditionavailable
unlimited
public
Peer reviewedYes
NRC number51701
NPARC number9077484
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Record identifierfd5cae99-4739-4f31-9d02-bc856fbaeabe
Record created2009-10-03
Record modified2016-05-09
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