Thermal Leakage Improvement by Using a High-Work-Function Ni Electrode in High-k TiHfO Metal-Insulator-Metal Capacitors

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DOIResolve DOI: http://doi.org/10.1149/1.2422874
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TypeArticle
Journal titleJournal of the Electrochemical Society
Volume154
Issue3
PagesG54G57
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744039
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Record identifierfee36cb4-aeee-4fa7-b31b-6696b5965f76
Record created2009-10-27
Record modified2016-05-09
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