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; Cahay, Marc
; Boolchand, Punit
; Fairchild, Steven B.
; Grazulis, Larry
; Murray, Paul T.
; Back, Tyson C.
; Semet, Vincent
; Binh, Vu Thien
; Wu, Xiaohua
; Poitras, Daniel
; Lockwood, David J.
; Yu, Fei
Journal of Vacuum Science Technology B, B29 (6), 2011-10-28, p. 06F602-1-06F602-14