Suspended silicon waveguides for long-wave infrared wavelengths

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TypeArticle
Journal titlePhysics
Article numberarXiv:1711.03468
Pages# of pages: 4
AbstractIn this paper we report suspended silicon waveguides operating at a wavelength of 7.67 mm with a propagation loss of 3.1 ? 0.3 dB/cm. To our knowledge this is the first demonstration of low loss silicon waveguides at such a long wavelength, with loss comparable to other platforms that use more exotic materials. The suspended Si waveguide core is supported by a subwavelength grating that provides lateral optical confinement, while also allowing access to the buried oxide layer so that it can be wet etched using hydrofluoric acid. We also demonstrate low loss waveguide bends and s-bends.
Publication date
PublisherCornell University Library
Linkhttps://arxiv.org/abs/1711.03468
LanguageEnglish
AffiliationAdvanced Electronics and Photonics; National Research Council Canada
Peer reviewedNo
NPARC number23002452
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Record identifier7b42dd14-dee3-4f03-93f9-619538578774
Record created2017-11-14
Record modified2017-11-14
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